Exentec is the supplier of choice for major semiconductor companies around the world, providing Point-of-Use (POU) gas abatement solutions for deposition, etch and diffusion process tools.

Our systems are some of the most efficient and reliable Epi scrubbers available. We combine inlet device technology with a PLC-based control box and automated gas inlet plunger to produce a low-maintenance Epi abatement system. This performance results in higher uptime, greater process stability and increased safety. Our systems combine 2 spray chambers and a packed column to produce some of the highest efficiencies in the industry.

Encompass

This industry first Wet-Burn-Wet abatement system combines two wet abatement technologies (Wet + Burn/Wet) into a single platform, allowing for efficient removal of water-soluble gasses prior to the burner.

Encompass is Exentec’s first thermal product line, developed by experienced specialists in wet abatement. The market-leading innovation combines active back flash suppression and wet wall burner technology. Revolutionary burner design and the pre-wet scrubbing chamber virtually eliminates burner maintenance and consumables.

Customers recognize that preprocessing abatement process gas streams allow them to maximize process tool uptime while also maintaining desired destruction rate efficiency. This lowers NOx by removing ammonia before the burner and minimizes particle formation in facilities' ductwork by removing precursors in the pre-wet abatement chamber.

Cyclone

Exentec's Cyclone wet abatement system is our flagship model which includes all of the advanced features that support zero system-related process tool downtime.

The Cyclone XL features a coarse-spray, high-flow nozzle that coats the first abatement chamber and removes bulk impurities. Strategic position increases efficiency, minimizes water use and eliminates foam.

Beneficial Features

• High Flow Capacity: Up to 5000slm flow capacity without loss of efficiency - more than 5 times most POU systems
• Gas Inlet Devices: Ambient or high temperature gas inlet devices minimize rate of restriction and automatic gas inlet plunger removes restrictions without process interruptions
• Packed Column: The final polish. Packing requires no maintenance or replacement
• Second and Third Abatement Chambers: Eleven fine spray, high velocity nozzles ensure effective removal of impurities
• First Abatement Chamber: Coarse spray, high-flow nozzle coats chamber and removes bulk impurities
• Fresh Water Input: Strategic position increases efficiency, minimizes water use and eliminates foam. Three flow stages to match process parameters
• Pump: Corrosion resistant, high-output and long life. Recirculates 25GPM
• Sump Geometry: Unique pump input, drain, and fresh water input locations prevent foaming, sediment, and minimize water use
• Small Footprint: 47.2 inches by 53.35 inches

Inlet Types

• Heated/CVD: Combining an internally heated, teflon lined and insulated inlet design with our automated plunger can reduce your system related downtown to zero
• Poly Etch CVD Inlet: Highly efficient gas abatement with patented gas inlet devices that minimize restrictions
• High-Temperature Inlet: For high temperature gas stream up to 220ºC
• Epitaxial Inlet: Exentec-specialized gas entry device that minimizes inlet restrictions and an automated gas inlet plunger that extends the hands-on maintenance interval to every 6 months

Inlet Configurations

• Standard Epitaxial: Only 1 port for Epitaxial and Cyclone, 2 inch PVC slip fit
• Standard 1-to-4 port non-heated Cyclone. Poly 1.5 inch slip-fit PVC inlets are standard but can be modified to incorporate SS reinforced KF 40 flange adapters
• Standard XL: 2 ports only, unheated only, KF 80, SS
• Standard 1 to 4 port heated, Cyclone 1.5 inch SS KF 40 flange

Cyclone XL

Our newest high-capacity, high-efficiency wet abatement system, the Cyclone XL features a coarse-spray, high-flow nozzle that coats the first scrubbing chamber and removes bulk impurities. Strategic position increases efficiency, minimizes water use and eliminates foam.

The Cyclone XL features a coarse-spray, high-flow nozzle that coats the first abatement chamber and removes bulk impurities. Strategic position increases efficiency, minimizes water use and eliminates foam.

Beneficial Features

• High Flow Capacity: Up to 5000slm flow capacity without loss of efficiency - more than 5 times most POU systems
• Gas Inlet Devices: Ambient or high temperature gas inlet devices minimize rate of restriction and automatic gas inlet plunger removes restrictions without process interruptions
• Packed Column: The final polish. Packing requires no maintenance or replacement
• Second and Third Abatement Chambers: Eleven fine spray, high velocity nozzles ensure effective removal of impurities
• First Abatement Chamber: Coarse spray, high-flow nozzle coats chamber and removes bulk impurities
• Fresh Water Input: Strategic position increases efficiency, minimizes water use and eliminates foam. Three flow stages to match process parameters
• Pump: Corrosion resistant, high-output and long life. Recirculates 25GPM
• Sump Geometry: Unique pump input, drain, and fresh water input locations prevent foaming, sediment, and minimize water use
• Small Footprint: 47.2 inches by 53.35 inches

Inlet Types

• Heated/CVD: Combining an internally heated, teflon lined and insulated inlet design with our automated plunger can reduce your system related downtown to zero
• Poly Etch CVD Inlet: Highly efficient gas abatement with patented gas inlet devices that minimize restrictions
• High-Temperature Inlet: For high temperature gas stream up to 220ºC
• Epitaxial Inlet: Exentec-specialized gas entry device that minimizes inlet restrictions and an automated gas inlet plunger that extends the hands-on maintenance interval to every 6 months

Inlet Configurations

• Standard Epitaxial: Only 1 port for Epitaxial and Cyclone, 2 inch PVC slip fit
• Standard 1-to-4 port non-heated Cyclone. Poly 1.5 inch slip-fit PVC inlets are standard but can be modified to incorporate SS reinforced KF 40 flange adapters
• Standard XL: 2 ports only, unheated only, KF 80, SS
• Standard 1 to 4 port heated, Cyclone 1.5 inch SS KF 40 flange